GFPS – GSEC

GFPS

GSEC FOUP Purification System

GFPS - GSEC FOUP Purification System

GFPS the FOUP cleaning system by GSEC (patent pending)

GFPS is a fully automated AMHS integrated FOUP purification system that exceeds the highest industry standards.

The separation of the to be cleaned surfaces FOUP shell and lid avoids cross-contamination and allows a drastic reduction in consumption.
The FOUP Shell itself becomes the cleaning chamber for inside cleaning. Media for cleaning the FOUP Shell and the FOUP Lid are managed completely separately. This avoids the cleaning process being influenced by the cleaning chamber or by the mixing of media in the cleaning chamber from inside/ outside and lid.
The special cleaning of the sealing area for the FOUP Lid and the FOUP Shell with a bath process, removes contamination in this particularly problematic area.
The GFPS cleaning system allows a maximum throughput (> 30 FOUPS per hour) with a small footprint of approx. 8 square meters. Access to the system is only required from the front and rear, which means that multiple systems can be lined up directly, resulting in significant space savings, next to each other.
The modular design of the GFPS allows assembly and installation on site in record time. The system can be moved in fully assembled or with individual modules to overcome space restriction.

Optimize the FOUP/ RSP/ EUV Purification Process for our customers.

GSEC provides total solutions to improve your manufacturing process through our technology expertise in decontaminating wafer and reticle carrier with fully integrated and automated systems to get your purification process to the next level. We provide you solutions for start-up, pilot line or high-volume manufacturing from design & development, manufacturing, installation, start up and after sales service & support. We help to improve your quality and performance offering high reliable equipment to become your trusted partner for highest purification process within the semiconductor field.

German Semiconductor Equipment Company GmbH

GFPS - GSEC FOUP Purification System

GFPS is a fully automated AMHS integrated FOUP purification system that exceeds the highest industry standards.

Optimize the FOUP/ RSP/ EUV Purification Process for our customers.