Fully automated AMHS integrated system for FOUP purification to exceed the highest industry requirements. Separation of the FOUP shell and lid surfaces to avoid cross contamination and reduce the consumption.
Fully automated on demand RSP purification system. Separation of the surfaces which must be cleaned. Highest Throughput with small footprint attached to the AMHS for fully automated HOST driven operation.
Fully automated EUV pod cleaner for AMHS integrated HOST driven operation.
